Effect of temperature on the formation of silicon nanoislands on noncrystalline substrates in microwave low-pressure gas discharge plasma.
| Autor: | Nefedov, D. V.1, Yafarov, R. K.1 pirpc@renet.ru |
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| Zdroj: | Technical Physics Letters. Jan2008, Vol. 34 Issue 1, p72-75. 4p. 2 Graphs. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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