Atomic layer deposition of chromium oxide nanolayers.
| Autor: | Ezhovskii, Yu. K.1 ezhovski@pochta.ru, Kirillova, M. A.1 |
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| Zdroj: | Inorganic Materials. Dec2007, Vol. 43 Issue 12, p1318-1322. 5p. 3 Diagrams, 5 Graphs. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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