Exploitation of atomic layer deposition for nanostructured materials

Autor:	Leskelä, Markku1 markku.leskela@helsinki.fi, Kemell, Marianna1, Kukli, Kaupo1, Pore, Viljami1, Santala, Eero1, Ritala, Mikko1, Lu, Jun2
Zdroj:	Materials Science & Engineering: C. Sep2007, Vol. 27 Issue 5-8, p1504-1508. 5p.
Databáze:	Academic Search Ultimate
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect