Formation of silicon nanodots from dysprosium-doped amorphous SiC x O y films grown by hot-filament assisted chemical vapor deposition of CH3SiH3 and Dy(DPM)3 gas jets

Autor:	Ikoma, Yoshifumi ikoma@zaiko.kyushu-u.ac.jp, Masaki, Takayoshi1, Kawai, Shinji1, Motooka, Teruaki1
Zdroj:	Applied Surface Science. Aug2007, Vol. 253 Issue 21, p8657-8660. 4p.
Databáze:	Academic Search Ultimate
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect