Si implantation in SiO2: Stucture of Si nanocrystals and composition of SiO2 layer
| Autor: | Levitcharsky, V.1, Saint-Jacques, R.G. sjacques@emt.inrs.ca, Wang, Y.Q.1, Nikolova, L.1, Smirani, R.1, Ross, G.G.1 |
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| Zdroj: | Surface & Coatings Technology. Aug2007, Vol. 201 Issue 19/20, p8547-8551. 5p. |
| Databáze: | Academic Search Ultimate |
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