Epitaxial Ti2AlN(0001) thin film deposition by dual-target reactive magnetron sputtering
Autor: | Persson, P.O.Å.1,2 perpe@ifm.liu.se, Kodambaka, S.2, Petrov, I.2, Hultman, L.1 |
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Zdroj: | Acta Materialia. Aug2007, Vol. 55 Issue 13, p4401-4407. 7p. |
Databáze: | Academic Search Ultimate |
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