Epitaxial Ti2AlN(0001) thin film deposition by dual-target reactive magnetron sputtering

Autor: Persson, P.O.Å.1,2 perpe@ifm.liu.se, Kodambaka, S.2, Petrov, I.2, Hultman, L.1
Zdroj: Acta Materialia. Aug2007, Vol. 55 Issue 13, p4401-4407. 7p.
Databáze: Academic Search Ultimate