Effect of elastic interactions on the formation of silicon nanocrystals on noncrystalline substrates in microwave low-pressure gas discharge plasma.
| Autor: | Nefedov, D. V.1, Yafarov, R. K.1 pirpc@renet.ru |
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| Zdroj: | Technical Physics Letters. Apr2007, Vol. 33 Issue 4, p284-287. 4p. 5 Graphs. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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