Uniformity analysis of wafer scale sub-25nm wide nanowire array nanoimprint mold fabricated by PEDAL process
| Autor: | Sonkusale, Sachin R. sachin.sonkusale@gmail.com, Di Spigna, Neil H.1, Franzon, Paul D.1 |
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| Zdroj: | Microelectronic Engineering. May2007, Vol. 84 Issue 5-8, p1523-1527. 5p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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