Deposition thickness based high-throughput nano-imprint template
| Autor: | Hussain, Muhammad Mustafa1 Muhammad.Hussain@sematech.org, Labelle, Ed2, Sassman, Barry1, Gebara, Gabe2, Lanee, Sidi2, Moumen, Naim3, Larson, Larry1 |
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| Zdroj: | Microelectronic Engineering. Apr2007, Vol. 84 Issue 4, p594-598. 5p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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