Interference inspection of the aspherical components of an objective for nanolithography.
| Autor: | Voznesensky, N.1, Gavrilov, E.1, Zhevlakov, A.2, Kirillovskiĭ, V.1, Orlov, P.2 |
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| Zdroj: | Technical Physics. Feb2007, Vol. 52 Issue 2, p271-275. 5p. 2 Charts, 4 Graphs. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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