Thermal correction of quasistatic optical distortions in a VUV lithograph.
| Autor: | Dimakov, S. A.1 dimakov@mail333.com, Zhuk, D. I.1, Kislitsyn, B. V.1, Kliment'ev, S. I.1 |
|---|---|
| Zdroj: | Optics & Spectroscopy. Jan2007, Vol. 102 Issue 1, p138-141. 4p. 5 Graphs. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
|