Oxidation of thin films of zirconium and Zr-Ti solid solutions on single-crystal silicon.

Autor: Khoviv, A. M.1 kcmf@chem.vsu.ru, Shramchenko, I. E.1
Zdroj: Inorganic Materials. Jan2007, Vol. 43 Issue 1, p40-45. 6p. 6 Charts, 6 Graphs.
Databáze: Academic Search Ultimate