Optical emission spectroscopy of glow discharge plasma from SiH4-CH4 system.
| Autor: | Motohashi, Mitsuya1, Ashibu, Kenta1, Hiruta, Yasutaka1, Homma, Kazuaki1 |
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| Zdroj: | Electronics & Communications in Japan, Part 2: Electronics. Feb2007, Vol. 90 Issue 2, p9-16. 8p. 4 Black and White Photographs, 3 Diagrams, 1 Chart, 7 Graphs. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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