Dense fully 111-textured TiN diffusion barriers: Enhanced lifetime through microstructure control...

Autor:	Chun, J. -S., Petrov, I.
Zdroj:	Journal of Applied Physics. 10/1/1999, Vol. 86 Issue 7, p3633. 9p. 10 Graphs.
Databáze:	Academic Search Ultimate
Externí odkaz:	Zobrazit plný text záznamu