Dense fully 111-textured TiN diffusion barriers: Enhanced lifetime through microstructure control...
Autor: | Chun, J. -S., Petrov, I. |
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Zdroj: | Journal of Applied Physics. 10/1/1999, Vol. 86 Issue 7, p3633. 9p. 10 Graphs. |
Databáze: | Academic Search Ultimate |
Externí odkaz: |