Effect of deposition temperature on the properties of amorphous silicon carbide thin films
| Autor: | Huran, J.1 elekhura@savba.sk, Hotový, I.2, Pezoltd, J.3, Balalykin, N.I.4, Kobzev, A.P.4 |
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| Zdroj: | Thin Solid Films. Oct2006, Vol. 515 Issue 2, p651-653. 3p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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