Microstructure and optical properties of TiO2 thin films prepared by low pressure hot target reactive magnetron sputtering

Autor: Domaradzki, J.1 jaroslaw.domaradzki@pwr.wroc.pl, Kaczmarek, D.1, Prociow, E.L.1, Borkowska, A.1, Schmeisser, D.2, Beuckert, G.2
Zdroj: Thin Solid Films. Aug2006, Vol. 513 Issue 1/2, p269-274. 6p.
Databáze: Academic Search Ultimate
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