Microstructure evolution of Al-doped zinc oxide films prepared by in-line reactive mid-frequency magnetron sputtering.
| Autor: | Hong, R. J.1, Jiang, X.1 xin.jiang@uni-siegen.de |
|---|---|
| Zdroj: | Applied Physics A: Materials Science & Processing. Jul2006, Vol. 84 Issue 1/2, p161-164. 4p. 4 Diagrams, 1 Graph. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
|