Langmuir probe measurements in inductively coupled CF4 plasmas
| Autor: | Huang, S. sw96@sohu.com, Ning, Z.Y.1, Xin, Y.1, Di, X.L.1 |
|---|---|
| Zdroj: | Surface & Coatings Technology. Mar2006, Vol. 200 Issue 12/13, p3963-3968. 6p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
|
Full Text from ScienceDirect