A Fabrication Method for Realizing Vertically Aligned Silicon Nanowires Featuring Precise Dimension Control.

Autor: Mukherjee, Sourav1 (AUTHOR) sourav.mukherjee@mail.mcgill.ca, Elsayed, Mohannad Y.2 (AUTHOR) mohannad.elsayed@mems-vision.com, Tawfik, Hani H.2 (AUTHOR) hani.tawfik@mems-vision.com, El-Gamal, Mourad N.1 (AUTHOR)
Zdroj: Sensors (14248220). Nov2024, Vol. 24 Issue 22, p7144. 11p.
Databáze: Academic Search Ultimate
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