Structural parameters determination of ALD-SnO2 thin films grown on silicon (100) and boron-doped silicon (100) substrates.
Autor: | Rodríguez-López, J.1 jrl_ibqa@hotmail.com, Rangel, R.2, Lara-Romero, J.2, Quintana-Owen, P.3, Bartolo-Pérez, P.3, Ramos-Carrazco, A.4 |
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Zdroj: | Journal of Ovonic Research. Sep/Oct2024, Vol. 20 Issue 5, p627-632. 6p. |
Databáze: | Academic Search Ultimate |
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