Structural parameters determination of ALD-SnO2 thin films grown on silicon (100) and boron-doped silicon (100) substrates.

Autor: Rodríguez-López, J.1 jrl_ibqa@hotmail.com, Rangel, R.2, Lara-Romero, J.2, Quintana-Owen, P.3, Bartolo-Pérez, P.3, Ramos-Carrazco, A.4
Zdroj: Journal of Ovonic Research. Sep/Oct2024, Vol. 20 Issue 5, p627-632. 6p.
Databáze: Academic Search Ultimate