A Review: Laser Interference Lithography for Diffraction Gratings and Their Applications in Encoders and Spectrometers.

Autor: Luo, Linbin1 (AUTHOR) luolb24@mails.tsinghua.edu.cn, Shan, Shuonan1 (AUTHOR) shansn24@mails.tsinghua.edu.cn, Li, Xinghui1,2 (AUTHOR) li.xinghui@sz.tsinghua.edu.cn
Zdroj: Sensors (14248220). Oct2024, Vol. 24 Issue 20, p6617. 44p.
Databáze: Academic Search Ultimate
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