PRECISE FINAL SPECIMEN THINNING BY CONCENTRATED ARGON ION BEAM MILLING OF PLAN VIEW TEM SPECIMENS PREPARED IN THE XENON PLASMA FIB.
| Autor: | Bonifacio, C. S.1 cs_bonifacio@fischione.com, Yu, Y.2, Ray, M. L.1, Skowronski, M.2, Fischione, P. E.1 |
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| Zdroj: | Electronic Device Failure Analysis. Nov2024, Vol. 26 Issue 4, p20-26. 6p. |
| Databáze: | Academic Search Ultimate |
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