Nitrogen‐Induced Microcrystalline‐to‐Nanocrystalline Structure Transition in Diamond Films Grown by Microwave Plasma Chemical Vapor Deposition: Comparison of N2 and NH3 Precursors.

Autor: Martyanov, Artem1 (AUTHOR) martyanov@nsc.gpi.ru, Tiazhelov, Ivan1,2 (AUTHOR), Voronov, Valery1 (AUTHOR), Savin, Sergey3 (AUTHOR), Popovich, Alexey1,4 (AUTHOR), Ralchenko, Victor1,5 (AUTHOR), Sedov, Vadim1 (AUTHOR)
Zdroj: Physica Status Solidi. A: Applications & Materials Science. Oct2024, p1. 8p. 9 Illustrations.
Databáze: Academic Search Ultimate
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