Estimating thermal transport in deep X-ray lithography with an inversion method.
| Autor: | Chang, W.-J.1 changwj@mail.ksut.edu.tw, Yang, Y.-C.1, Lin, C.-M.2 |
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| Zdroj: | Applied Physics B: Lasers & Optics. Aug2005, Vol. 81 Issue 4, p543-548. 6p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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