Annealing behaviors of open spaces and gas desorption in chemical vapor deposited SiO2 studied with monoenergetic positron beams.

Autor:	Uedono, Akira1 (AUTHOR) uedono.akira.gb@u.tsukuba.ac.jp, Hasunuma, Ryu1 (AUTHOR), Onishi, Koki2 (AUTHOR), Kitagawa, Hayato2 (AUTHOR), Inoue, Fumihiro2 (AUTHOR), Michishio, Koji3 (AUTHOR), Oshima, Nagayasu3 (AUTHOR)
Zdroj:	Journal of Applied Physics. 7/28/2024, Vol. 136 Issue 4, p1-8. 8p.
Databáze:	Academic Search Ultimate
Externí odkaz:	Zobrazit plný text záznamu