Properties of phosphorus-boron co-doped c-Si quantum dots/SiNx:H thin film prepared by PECVD in-situ deposition.

Autor: Gu, Zhifeng1 (AUTHOR) luoyanggzf@163.com, Shan, Feng2 (AUTHOR), Liu, Jia2 (AUTHOR) lj2000ppp933@163.com
Zdroj: Scientific Reports. 9/16/2024, Vol. 14 Issue 1, p1-10. 10p.
Databáze: Academic Search Ultimate
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