Development of a MEMS Piezoresistive High-g Accelerometer with a Cross-Center Block Structure and Reliable Electrode.

Autor: Li, Cun1 (AUTHOR) cun.li@xjtu.edu.cn, Zhang, Ran1 (AUTHOR) zran0612@stu.xjtu.edu.cn, Hao, Le1 (AUTHOR), Zhao, Yulong1 (AUTHOR)
Zdroj: Sensors (14248220). Sep2024, Vol. 24 Issue 17, p5540. 17p.
Databáze: Academic Search Ultimate
Nepřihlášeným uživatelům se plný text nezobrazuje