Simulation and analysis of capacitance-voltage characteristics of a circular MEMS actuator using Al2O3 as dielectric oxide layer and compared with SiO2.
| Autor: | Reddy, Busireddy Mahesh1 (AUTHOR), Anitha, G.1 (AUTHOR) anithag.sse@saveetha.com |
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| Zdroj: | AIP Conference Proceedings. 2024, Vol. 2871 Issue 1, p1-8. 8p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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