Characterization of dielectric diffraction gratings on multilayer structures by spectroscopic ellipsometry.
| Autor: | Henn, Sebastian1 (AUTHOR) sebastian.henn@physik.uni-leipzig.de, Grundmann, Marius1 (AUTHOR), Sturm, Chris1 (AUTHOR) |
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| Zdroj: | Journal of Applied Physics. 8/21/2024, Vol. 136 Issue 7, p1-7. 7p. |
| Databáze: | Academic Search Ultimate |
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