Deep learning-based characterization of ion implantation parameters for photo modulated optical reflectance.

Autor: Wang, Xuesong1 (AUTHOR), Zhang, Lijun1 (AUTHOR), Sun, Yong1 (AUTHOR), Min, Jin1 (AUTHOR), Wang, Zhongyu1 (AUTHOR), Liu, Shiyuan1 (AUTHOR), Chen, Xiuguo1 (AUTHOR), Tang, Zirong1 (AUTHOR) zirong@hust.edu.cn
Zdroj: Journal of Applied Physics. 8/14/2024, Vol. 136 Issue 6, p1-9. 9p.
Databáze: Academic Search Ultimate