EFFECT OF DEPOSITION TEMPERATURE ON OPTICAL PROPERTIES OF ALUMINUM OXIDE THIN FILMS PREPARED BY ATOMIC LAYER DEPOSITION.
| Autor: | Liu Chundong1, Xu Hailong2, Shi Shuzheng1,3,4 shishuzheng2000@126.com, Wang Zhanying1, Han Yifan1, Pang Yongjun1 |
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| Zdroj: | International Journal of Mechatronics & Applied Mechanics. 2024, Issue 16, p82-92. 11p. |
| Databáze: | Academic Search Ultimate |
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