Aluminium Nitride Surface Characterization by Grinding with Laser–Ultrasonic Coupling.

Autor: Zhang, He1 (AUTHOR) 2270273@stu.neu.edu.cn, Sun, Cong1,2 (AUTHOR) 2110112@stu.neu.edu.cn, Hong, Yuan1 (AUTHOR), Deng, Yansheng3 (AUTHOR) dengys@jihualab.com, Ma, Liang4 (AUTHOR) maliang7653@sina.com
Zdroj: Materials (1996-1944). Aug2024, Vol. 17 Issue 15, p3772. 15p.
Databáze: Academic Search Ultimate
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