On Morphology of Aluminum–Gallium Nitride Layers Grown by Halide Vapor Phase Epitaxy: The Role of Total Reactants' Pressure and Ammonia Flow Rate.

Autor: Jaroszynski, Piotr1 (AUTHOR) arianna.jaroszynska@unipress.waw.pl, Dabrowski, Michal1 (AUTHOR), Sadovy, Petro1 (AUTHOR), Bockowski, Michal1 (AUTHOR), Czernecki, Robert1 (AUTHOR), Sochacki, Tomasz1 (AUTHOR)
Zdroj: Materials (1996-1944). Jul2024, Vol. 17 Issue 14, p3446. 15p.
Databáze: Academic Search Ultimate
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