The local structural characterization of the inactive clusters in B, BF2 and BF3 implanted Si wafers using X-ray techniques
| Autor: | Sahiner, M. Alper1 sahineme@shu.edu, Downey, Daniel F.2, Novak, Steven W.3, Woicik, Joseph C.4, Arena, Dario A.5 |
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| Zdroj: | Microelectronics Journal. Mar2005, Vol. 36 Issue 3-6, p522-526. 5p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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