On the actuation nonlinearity of normal-stressed electromagnetic nanopositioning stages.
| Autor: | Chen, Li1 (AUTHOR), Liu, Qiang2 (AUTHOR), Zhu, LiMin3 (AUTHOR), Zhu, Zhiwei1 (AUTHOR) zw.zhu@njust.edu.cn |
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| Zdroj: | Precision Engineering. Jun2024, Vol. 88, p100-108. 9p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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