Characterization of an RF-excited broad beam ion source operated with a mixture of CHF3 and O2.
Autor: | Rohkamm, Erik1 (AUTHOR) erik.rohkamm@iom-leipzig.de, Spemann, Daniel1 (AUTHOR), Scholze, Frank1 (AUTHOR), Frost, Frank1 (AUTHOR) |
---|---|
Zdroj: | Journal of Applied Physics. 6/14/2024, Vol. 135 Issue 22, p1-9. 9p. |
Databáze: | Academic Search Ultimate |
Externí odkaz: |