Characterization of an RF-excited broad beam ion source operated with a mixture of CHF3 and O2.
| Autor: | Rohkamm, Erik1 (AUTHOR) erik.rohkamm@iom-leipzig.de, Spemann, Daniel1 (AUTHOR), Scholze, Frank1 (AUTHOR), Frost, Frank1 (AUTHOR) |
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| Zdroj: | Journal of Applied Physics. 6/14/2024, Vol. 135 Issue 22, p1-9. 9p. |
| Databáze: | Academic Search Ultimate |
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