Complex profile metrology via physical symmetry enhanced small angle x-ray scattering.
| Autor: | Wang, Dawei1,2 (AUTHOR), Liang, Hongtao3 (AUTHOR), Yang, Hairui2,3 (AUTHOR), Yu, Hong1,2,3 (AUTHOR) yuhong@zjlab.ac.cn |
|---|---|
| Zdroj: | Journal of Applied Physics. 6/14/2024, Vol. 135 Issue 22, p1-11. 11p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
|