Internal energy evaluation of sputtered molecule under size-selected argon cluster ion bombardment onto soft or hard sample.

Autor:	Toku, Taisei1 (AUTHOR), Moritani, Kousuke1 (AUTHOR) moritani@eng.u-hyogo.ac.jp, Tanaka, Yudai1 (AUTHOR), Inui, Norio1 (AUTHOR)
Zdroj:	Nuclear Instruments & Methods in Physics Research Section B. Aug2024, Vol. 553, pN.PAG-N.PAG. 1p.
Databáze:	Academic Search Ultimate
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect