Research on Evolution of Relevant Defects in Heavily Mg-Doped GaN by H Ion Implantation Followed by Thermal Annealing.

Autor: Jiang, Zonglin1,2 (AUTHOR) jiangzl@semi.ac.cn, Yan, Dan1 (AUTHOR) yandan@semi.ac.cn, Zhang, Ning1 (AUTHOR) zhangn@semi.ac.cn, Wang, Junxi1,2 (AUTHOR) jxwang@semi.ac.cn, Wei, Xuecheng1,2 (AUTHOR) xcwei@semi.ac.cn
Zdroj: Materials (1996-1944). Jun2024, Vol. 17 Issue 11, p2518. 10p.
Databáze: Academic Search Ultimate
Nepřihlášeným uživatelům se plný text nezobrazuje