In situ formation of inhibitor species through catalytic surface reactions during area-selective atomic layer deposition of TaN.
| Autor: | Merkx, Marc J. M.1 (AUTHOR), Tezsevin, Ilker1 (AUTHOR), Yu, Pengmei1 (AUTHOR), Janssen, Thijs1 (AUTHOR), Heinemans, Rik H. G. M.1 (AUTHOR), Lengers, Rik J.1 (AUTHOR), Chen, Jiun-Ruey2 (AUTHOR), Jezewski, Christopher J.2 (AUTHOR), Clendenning, Scott B.2 (AUTHOR), Kessels, Wilhelmus M. M.1 (AUTHOR), Sandoval, Tania E.3 (AUTHOR) tania.sandoval@usm.cl, Mackus, Adriaan J. M.1 (AUTHOR) a.j.m.mackus@tue.nl |
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| Zdroj: | Journal of Chemical Physics. 5/28/2024, Vol. 160 Issue 20, p1-9. 9p. |
| Databáze: | Academic Search Ultimate |
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