重掺杂P 型SiC 的熔融KOH 刻蚀行为研究.

Autor: 程佳辉1, 杨 磊1 2296065518@qq.com, 王劲楠2, 龚春生2 645385331@163.com, 张泽盛2, 简基康1 Zhangzesheng92@foxmail.com
Zdroj: Journal of Synthetic Crystals. May2024, Vol. 53 Issue 5, p773-780. 8p.
Databáze: Academic Search Ultimate
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