Impact of the Crystal Structure of Interlayer on the Properties of Zr‐Doped Hafnia‐Based Ferroelectric Capacitor.
Autor: | Park, Inseon1,2 (AUTHOR), Choi, Yejoo3 (AUTHOR), Shin, Changhwan1 (AUTHOR) cshin@korea.ac.kr |
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Zdroj: | Physica Status Solidi. A: Applications & Materials Science. May2024, Vol. 221 Issue 9, p1-6. 6p. |
Databáze: | Academic Search Ultimate |
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