A density functional tight-binding based strategy for modeling ion bombardment and its application to Ar bombardment of silicon nitride.
| Autor: | Cheng, Erik S.1 (AUTHOR), Ventzek, Peter L. G.2 (AUTHOR), Hwang, Gyeong S.1,3 (AUTHOR) gshwang@che.utexas.edu |
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| Zdroj: | Journal of Applied Physics. 3/7/2024, Vol. 135 Issue 9, p1-11. 11p. |
| Databáze: | Academic Search Ultimate |
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