Frequency Response Analysis of MEMS Comb-Drive Resonator Integrated With a Polymer Thin Film Layer.
| Autor: | Tez, Serdar1 stez@pau.edu.tr, Kaya, Mehmet2 |
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| Zdroj: | Electrica. Jan2024, Vol. 24 Issue 1, p210-217. 8p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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