ELECTRON BEAM LITHOGRAPHY PROCESS QUALITY IMPROVEMENT BY ROBUST ENGINEERING APPROACH.
| Autor: | Koleva, Lilyana1, Asenova-Robinzonova, Asya1, Koleva, Elena1,2 eligeorg@uctm.edu |
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| Zdroj: | Journal of Chemical Technology & Metallurgy. 2024, Vol. 59 Issue 2, p439-450. 12p. |
| Databáze: | Academic Search Ultimate |
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