Wet Oxidation of Semiconducting Silicon Carbide Wafers.
| Autor: | LU Xuesong1,2, WANG Wantang1,2,3, WANG Rong1,2 rong_wang@zju.edu.cn, YANG Deren1,2, PI Xiaodong1,2 xdpi@zju.edu.cn |
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| Zdroj: | Journal of Synthetic Crystals. Feb2024, Vol. 53 Issue 2, p181-193. 13p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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