Planar Magnetron with Heated Boron Target for In Situ Investigation of Boron Film Deposition.

Autor:	Bugaev, A. S.1 (AUTHOR) bugaev@opee.hcei.tsc.ru, Cherkasov, A. A.1 (AUTHOR), Frolova, V. P.1,2 (AUTHOR), Gushenets, V. I.1 (AUTHOR), Nikolaev, A. G.1 (AUTHOR), Oks, E. M.1,2 (AUTHOR), Savkin, K. P.1 (AUTHOR), Shandrikov, M. V.1 (AUTHOR), Vizir, A. V.1 (AUTHOR)
Zdroj:	Russian Physics Journal. Dec2023, Vol. 66 Issue 10, p1108-1113. 6p.
Databáze:	Academic Search Ultimate
Externí odkaz:	Zobrazit plný text záznamu