In Situ and Real-Time Monitoring of Doping Levels by Reflectance Anisotropy Spectroscopy (RAS) during Molecular Beam Epitaxial (MBE) Growth of III/V Semiconductors.

Autor: Fouckhardt, Henning1 (AUTHOR), Richter, Johannes1 (AUTHOR), Doering, Christoph1 (AUTHOR), Strassner, Johannes1 (AUTHOR)
Zdroj: Advances in Materials Science & Engineering. 12/13/2023, p1-12. 12p.
Databáze: Academic Search Ultimate
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